Micro/Nano Systems
Small forces can become readable systems.
At micro/nano scale, surface forces shape device behavior. Casimir, van der Waals, electrostatic, capillary, and contact forces can change motion, stiction, resonance, and readout.
MaxwellX path
The first MaxwellX micro/nano path is force control:
- model geometry-dependent force behavior
- measure force-gradient signatures
- couple signatures into a MEMS/NEMS readout
- translate force changes into electrical signals
Applications path
- stiction management
- micro-actuation
- force-gradient sensors
- oscillator readouts
- surface-force calibration
- nanoscale test structures